Micromechatronics, Inc. (MMech)

www.mmech.com - Ph: 814-861-5688

Piezo Assist Stage

Piezo Mechanisms

top2601SPA Lg

What is Piezo Assist Stage?

Piezo Assist Stage is a manual stage where its fine positioning resolution is 20 nanometer while the coarse positioning range can be several millimeters to 13 millimeters. The Piezo Assist Stage is mainly used for positioning table or jig or for controlling very precise and very small load in application like nano indentation. The Piezo Assist Stage is compact in size and user friendly.

Model NameTable SizeCoarse MovementFine MovementFine Movement Minimum ResolutionMicrometer operation position
MTPA-2251SPA 25x25mm ±3mm 25um & above Below 20nm Side
MTPA-2251SRPA 25x25mm ±3mm 25um & above Below 20nm Side
MTPA-2251SRZPA 25x25mm ±3mm 25um & above Below 20nm Side
MTPA-2251SZPA 25x25mm ±3mm 25um & above Below 20nm Side
MTPA-2401SPA 40x40mm ±6.5mm 30um & above Below 20nm Side
MTPA-2401SRPA 40x40mm ±6.5mm 30um & above Below 20nm Side
MTPA-2401SRZPA 40x40mm ±6.5mm 30um & above Below 20nm Side
MTPA-2401SZPA 40x40mm ±6.5mm 30um & above Below 20nm Side
MTPA-2601SPA 60x60mm ±6.5mm 30um & above Below 20nm Side
MTPA-2601SRPA 60x60mm ±6.5mm 30um & above Below 20nm Side
MTPA-2601SRZPA 60x60mm ±6.5mm 30um & above Below 20nm Side
MTPA-2601SZPA 60x60mm ±6.5mm 30um & above Below 20nm Side

More Information

101 Innovation Blvd. Suite 308
State College, PA 16803, USA
Ph: (814)-861-5688
Fax: (814)-861-1418
contact@mmech.com
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