Piezo Assist Stage
Drawings and dimension (Units: mm)
|Course Drive Travel||±6.5mm|
|Fine Drive Travel||>30μm|
|Movement per Rotation||0.5mm|
|Micrometer Readable Resolution||0.01mm|
|Fine movement minimum resolution||<20nm|
|Guide||Ball Bearing guide|
|Load capacity||9.8N (5.0kgf)|
|Max. Moment Capacity/Pitch||2.5 N·m|
|Max. Moment Capacity/Roll||2.5 N·m|
- Please handle the micrometer bracket with caution during the setup of the stage. If any shock occurred, the Piezo Assist mechanism may be damaged.
- When the power of the Piezo Assist controller is being switched OFF, there will be changes on the position adjustment of Piezo Assist, causing fine adjustment position alignment changes.
- Please make sure to lock the stage when moving/carrying the Piezo Assist Stage. Moving/Carrying the Piezo Assist stage may cause damage to the Piezo Assist mechanism.