W-357 Series Ultrasonic Pulse Jet Cleaners
Pulse Jet Cleaner
Features
- Applying ultrasonic pressure to the water stream from the nozzle creates particle acceleration in the water and the water particle motion removes submicron contamination on the objective works.
- Fresh DI water supply avoids re-contamination within the cleaning media.
- Suitable for single wafer processing system.
- High frequency ultrasound (megasonic) is effective for fine particle contamination.
- Output power control can adjust the power and suitable for delicate object like magnetic head.
Frequency Options
W-357-P50
W-357-P50: Combination with high power transducer for high power application
- Larger cleaning area than other or traditional models.
- Lower frequency(400kHz) and high output power enables strong cleaning power.
- P.P material is used for the horn and avoids to generate metal ion.
Applications
- Cleaning after mirror polishing or before vapor deposition of GaAs wafer
- Cleaning of HDD media or Si wafers
- Cleaning for CMP post process
Specifications
| Model | W-357P-50 |
|---|
| Generator |
| Oscillation Mode |
Single Frequency Oscillation |
| Rated Output |
100W |
| Oscillation Frequency |
400kHz |
| Power Supply |
100-240 VAC, 50/60Hz/300VA |
| Output Setting Range |
0 to 100% |
| Operating Conditions |
Temp - 5 to 40C, Humidity - 10 to 85% |
| Generator Dim. (mm) |
232W x 340D x 138H (including rubber feet) |
| Generator Weight (kg) |
6.0 |
| Alarm Output |
(Photocoupler rating) 24VDC, 20mA or less |
| Power supply cable length |
100V/2m or 200V/3m |
| Protection circuit |
Dry operations prevention cable, alarm output cable of 5m length |
| Nozzle |
| Nozzle Dim. (mm) |
60 Dia x 135 mm |
| Nozzle Weight (g) |
700 |
| Water Intake |
Specified tube (Outer dia. 13mm) |
| Flow Rate |
4L/min |
| Control cable length |
5m x 4 |
| Range of Liquid Temp. |
20 - 50C |
| Transducer Nozzle Dia |
8.0mm |
| Materials |
| Nozzle |
Polypropylene |
| Gasket |
Silicon Rubber |
| Transducer |
PZT |
| Vibration Plate |
Tantalum |
W-357-1MPG
W-357-1MPG: Combination with high power transducer for high power application
- Digital constant power generator. Keeping high cleaning power with low power consumption, thanks to the digital control.
- Suitable to delicate cleaning such as magnetic head.
- Outer diameter is only 25 mm and is easy for embedding to the existing semiconductor processing equipment.
- Avoiding metal ion from horn by non-metal construction.
- Capability of RS-422A interface and output power can be measured 4-20 mA current.
Applications
- Cleaning after mirror polishing or before vapor deposition of GaAs wafer
- Cleaning of HDD media or Si wafers
- Cleaning for CMP post process
Specifications
| Model | W-357-1 MPG |
|---|
| Generator |
| Oscillation Mode |
Single Frequency Oscillation |
| Rated Output |
40W |
| Oscillation Frequency |
1 MHz |
| Power Supply |
100-240 VAC, 50/60Hz/300VA |
| Output Setting Range |
0 to 40W |
| Operating Conditions |
Temp - 5 to 40C, Humidity - 10 to 85% |
| Generator Dim. (mm) |
180W x 250D x 100H (including rubber feet) |
| Generator Weight (kg) |
2.2 |
| Alarm Output |
(on the unit) 24VDC, 0.5 mA |
| Power supply cable length |
100V/2m or 200V/3m |
| Protection circuit |
Dry operations prevention cable, alarm output cable of 5m length |
| Nozzle |
| Nozzle Dim. (mm) |
25 Dia x 80 mm |
| Nozzle Weight (g) |
300 |
| Water Intake |
Compatible tube (Outer dia. 6 mm) |
| Flow Rate |
0.9L/min |
| Control cable length |
5m x 4 |
| Liquid Temp. Range |
20 - 50C |
| Transducer Nozzle Dia |
4.0mm |
| Materials |
| Nozzle |
PCTFE, PTFE |
| Gasket |
Perfluoroelastomer |
| Transducer |
PZT |
| Vibration Plate |
Special ceramic |
W-357-1.5MPG
W-357-1.5MPG: Combination with high power transducer for high power application
- High frequency, 1.5 MHz ultrasonic power removes finer particles.
- RS-422A interface is equipped.
Applications
- Cleaning after mirror polishing or before vapor deposition of GaAs wafer
- Cleaning of HDD media or Si wafers
- Cleaning for CMP post process
Specifications
| Model | W-357-1.5 MPG |
|---|
| Generator |
| Oscillation Mode |
Single Frequency Oscillation |
| Rated Output |
40W |
| Oscillation Frequency |
1.5 MHz |
| Power Supply |
100-240 VAC, 50/60Hz/300VA |
| Output Setting Range |
0 to 40W |
| Operating Conditions |
Temp - 5 to 40C, Humidity - 10 to 85% |
| Generator Dim. (mm) |
180W x 250D x 100H (including rubber feet) |
| Generator Weight (kg) |
2.2 |
| Alarm Output |
(on the unit) 24VDC, 0.5 mA |
| Power supply cable length |
100V/2m or 200V/3m |
| Protection circuit |
Dry operations prevention cable, alarm output cable of 5m length |
| Nozzle |
| Nozzle Dim. (mm) |
29 x 34 x 92 mm |
| Nozzle Weight (g) |
300 |
| Water Intake |
Compatible tube (Outer dia. 6 mm) |
| Flow Rate |
0.9L/min |
| Control cable length |
5m x 4 |
| Liquid Temp. Range |
20 - 50C |
| Transducer Nozzle Dia |
4.0mm |
| Materials |
| Nozzle |
PCTFE, PTFE |
| Gasket |
Perfluoroelastomer |
| Transducer |
PZT |
| Vibration Plate |
Tantalum |
W-357-3MPG
W-357-3MPG: Combination with high power transducer for high power application
- Highest frequency in the series cleans super fine particles, suppressing the damage to the work at minimum.
Applications
- Cleaning after mirror polishing or before vapor deposition of GaAs wafer
- Cleaning of HDD media or Si wafers
- Cleaning for CMP post process
Specifications
| Model | W-357-3 MPG |
|---|
| Generator |
| Oscillation Mode |
Single Frequency Oscillation |
| Rated Output |
40W |
| Oscillation Frequency |
3 MHz |
| Power Supply |
100-240 VAC, 50/60Hz/300VA |
| Output Setting Range |
0 to 40W |
| Operating Conditions |
Temp - 5 to 40C, Humidity - 10 to 85% |
| Generator Dim. (mm) |
180W x 250D x 100H (including rubber feet) |
| Generator Weight (kg) |
2.2 |
| Alarm Output |
(on the unit) 24VDC, 0.5 mA |
| Power supply cable length |
100V/2m or 200V/3m |
| Protection circuit |
Dry operations prevention cable, alarm output cable of 5m length |
| Nozzle |
| Nozzle Dim. (mm) |
29 x 34 x 92 mm |
| Nozzle Weight (g) |
300 |
| Water Intake |
Compatible tube (Outer dia. 6 mm) |
| Flow Rate |
0.9L/min |
| Control cable length |
5m x 4 |
| Liquid Temp. Range |
20 - 50C |
| Transducer Nozzle Dia |
4.0mm |
| Materials |
| Nozzle |
Special ceramic, PCTFE |
| Gasket |
Viton rubber, Silicon rubber |
| Transducer |
PZT |
| Vibration Plate |
Special ceramic |
How to order
If you need a specific quote, please request so by sending us an e-mail through "Request for Quote" by refering to the following part number or by calling us at 814-861-5688 (8:30am to 5:30pm EST). You can also directly place an order by calling us with your credit card information or sending us a Purchase Order form.
Cleaners
