Micromechatronics, Inc. (MMech)

www.mmech.com - Ph: 814-861-5688

CEDRAT Piezo Mechanisms

CEDRAT Piezoelectric Actuators

Mainly based on the APA concept, CEDRAT TECHNOLOGIES has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantage of the APA concept offering a reliable, robust, precise and compact solution to its users.

These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force:

FPS200M - Fast Piezo Shutter

 

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Developed by Cedrat in collaboration with EMBL (Dr. Cipriani), it is based on standard piezo amplified actuators APA200M with a special optical head. It provides a compact and low jitter shutter for X ray beam.

Max Displacement: 400µm
Resonance Freq: 850Hz (unloaded)
Dimensions (mm): 21x60x44

Options: Strain Gauges; Vacuum; Tungsten interfaces

Status: Standard Product

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FPS400M - Fast Piezo Shutter

 

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Developed by Cedrat in collaboration with EMBL (Dr. Cipriani), it is based on standard piezo amplified actuators APA400M with a special optical head. It provides a compact and low jitter shutter for X ray beam.

Max Displacement: 800µm
Resonance Freq: 430Hz (unloaded)
Dimensions (mm): 21x60x44

Options: Strain Gauges; Vacuum; Tungsten interfaces

Status: Standard Product

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FPS900M - Fast Piezo Shutter

 

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FPS900M - Fast Piezo Shutter

Developed by Cedrat in collaboration with EMBL (Dr. Cipriani), it is based on standard piezo amplified actuators APA900M with a special optical head. It provides a compact and low jitter shutter for X ray beam.

Max Displacement: 1600µm
Resonance Freq: 248Hz (unloaded)
Dimensions (mm): 23x60x44

Options: Strain Gauges; Vacuum; Tungsten interfaces

Status: Standard Product

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XY25XS - XY Piezo Stage

 

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It is based on the APA25XS actuators. The compact XY25XS stage is well suited to integrate devices for fiber positioning, micro scanning.

Max Displacement: 25µm

Resonance Freq: 3000Hz (unloaded)

Dimensions (mm): 20x50x50

Options: Strain Gauges; Eddy Current Sensors

Status: Standard Product

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XY200M - XY Piezo Stage

 

 

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It is based on the APA200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.

Max No-load displacement: 200µm
Resolution: 2.0nm
Resonance Freq: 580Hz (unloaded)
Dimensions (mm): 22x100x100

Options: Strain Gauges; Eddy Current Sensors

Status: Standard Product

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XYZ200M - XYZ Piezo Stage

 

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It is based on the APA200M actuators and posses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.

Max No-load displacement: 200µm
Max Z displacement: 200µm
Resolution: 2.0nm
Resonance Freq: 380Hz (unloaded)
Response time: 1.32ms
Dimensions (mm): 49x100x100

Options: Strain Gauges; Eddy Current Sensors

Status: Standard Product

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TT60SM

 

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The tilt translator is based on 2 APA60SM actuators. Two types of movement can be generated: translation and tilt.

Max. No-load displacement: 50µm
Angular displacement: 11.30mrad
Resolution: 0.1µrad
Resonance Freq: 400Hz (unloaded)
Dimensions (mm): 55 Dia x 35.0 H

Options: Strain Gauge; Vacuum;

Status: Standard Product

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OPP120SM

 

 

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The objective piezo positioner OPP120SM is using the APA120SM actuator and an additional guiding to move vertically and accurately the objective.

Max. No-load displacement: 140µm
Dimensions (mm): 50x65x40
Resonance Freq: 440Hz (unloaded)
Response time: 1.14ms

Options: Eddy Current Sensors

Status: Standard Product

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X60S - Linear Stage

 

 

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Single axis guided linear stage for that can be wquiped with Strain Gages for very fine positioning. Two stages (shown) can be stacked for 2 axis motion.

Max No-load displacement: 55µm
Resolution: 0.6nm
Resonance Freq: 600Hz (unloaded in actuators direction)
Dimensions (mm): 12x30x30

Options: Strain Gauges

Status: Preliminary Product

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X120S - Linear Stage

 

 

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The piezoelectric stage X120S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm. Two stages (shown) can be stacked for 2 axis motion.

Max No-load displacement: 115µm
Resolution: 1.2nm
Resonance Freq: 1200Hz (unloaded in actuators direction)
Dimensions (mm): 12x30x30

Options: Strain Gauges

Status: Preliminary Product

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