Micromechatronics, Inc. (MMech)

www.mmech.com - Ph: 814-861-5688

HLF810/820 Ultrasonic Flowmeter

Ultrasonic Flowmeter


pdf-icon_smHLF810/820 DATA SHEET



Measurement Time of Flight
Accuracy ±1% F.S.(DIW 20 deg C)
Data Update Cycle 0.01 second
Power Source Voltage 24 V DC ±10 % (21.6 - 26.4 V)
Power 4 W approx. 5 W approx.
Display None VFD (16 charactors / 2 line)
Digital Input Open collector (Max 35 V / 0.1 A x 2) Selectable from integrated value reset or 0 (zero) point adjustment input
Output 4-20 mA current 2 Resolution: 12bit (RLMax. = 450??
Digital Open collector (Max 35 V / 0.1 A)?x 2 Selectable from comparison, integrated pulse, instantaneous frequency or error output
Interface RS-485 (MODBUS protocol, RTU mode) Up to 32 converters can be concatenated (address setting : 1- 32) Baud rate: 9600, 19200, 38400, 57600 bps
Case Material ABS
Operating Temperature 0 - 50 deg C (No condensation)
weight 130g 230g
Installation DIN Rail Panel Mount

Sensing  Options for HLF810/820 Converter

Model HLFS01-04 HLFS01-06 HLFS01-08 HLFS01-12
Application Ultrapure water / Pure water / Chemical liquid
Flow Rate Range 0 - 2 L/min 0 - 6 L/min 0 - 20 L/min 0 - 50 L/min
Tube Size 1/4 inch 3/8 inch 1/2 inch 3/4 inch
Max. operating pressure 0.5 MPa (0 - 90 deg C) / 0.2 MPa (90 - 180 deg C)
Max. fluid temp. Standard type: 0 - 90 deg C High-temperature type: 0 - 200 deg C
Operation temperature 0 - 80 deg C
Wetted surface NEW PFA
Weight 90g 110g 130g 160g
Pressure loss factor (A) 3.7863 0.6937 0.1146 0.0138


To Calculate pressure loss:  PL=AQ2

PL: Pressure loss[KPa] , A: Pressure loss factor (20 deg C Pure water), Q: Flow rate [L/min]


    • Stable measurement by DSP (Digital Signal Processor) even with bubbly environment.


    • Fitting two sensor unit to one main unit. Realizes good space factor and cost effectivity by controlling two sensors in one main unit. Different chemical, different size measurement is possible.


    • Good readability: VFD (Vacuum Fluorescent Display) gives very good readability in limited installation space (HLF820).


    • Controller is available with (HLF820) or without (HLF810) display.
    • High temperature, chemical resistant: All contacting surface to the measuring liquid is made by chemical resistant NEW PFA. Genuine sel-developed ceramics element realizes the use in high temperature liquid up to 200 deg C (K type).
    • Detachable cable enables easy installation: Sensor cable can be detached from the sensor unit, so the installation of the sensor unit is easily done without cable. The cable length can be selected from 5 or 7 meters.


    • PC monitoring is possible using an RS-485 communication: "HLF800 monitor"  software is supplied for PC monitoring. Install the software into a Windows PC and it controls the parameter settings and monitors the measurement data via RS-485 communication.




  • Compliant to EMS regulation (EN61326) and ROHS

Principles of Operation

The HLF800 Series uses the "Time of Flight" measurement method. Using ultrasonic waves the flowmeter measures the fluid velocity and calculates the flow rate. Transducers are installed updtream and downstream.  


They then transmit ultrasonic signals with the flow and against the flow of the fluid, the velocity is optained from the time elapsed for the ultrasonic transmission and converted to the flow rate.



  • Flow measurement of DIW or ultrapure water for the semiconductor manufacturing process.
  • Flow control of high corrosive chemical liquid.
  • Flow control of slurry liquid for CMP (Chemical Mechanical Polishing).

How to order

If you need a specific quote, please request it by sending us an e-mail through "Request for Quote" and refering to the following part number or by calling us at 814-861-5688 (8:30am to 5:30pm EST). You can also directly place an order by calling us with your credit card information or sending us a Purchase Order form.

Part NumberArticle DescriptionQtyPrice
HLF810 Ultrasonic Flowneter-without display 1 unit $ 1150.00
HLF820 Ultrasonic Flowmeter - with display 1 unit $ 1350.00
HLFS01-04 Sensor - 0.05-2 L/min 1 unit $ 1250.00
HLFS01-06 Sensor - 0.10-6 L/min 1 unit $ 1250.00
HLFS01-08 Sensor - 0.5-20 L/min 1 unit $ 1250.00
HLFS01-12 Sensor - 1.0-50 L/min 1 unit $ 1250.00

**Prices subject to change without notice.

Cable Length Options

ModelHLFS01 cable 5mHLFS01 cable 7m
Material ETFE ETFE
Length 5m 7m
Weight 150g 210g

More Information

101 Innovation Blvd. Suite 308
State College, PA 16803, USA
Ph: (814)-861-5688
Fax: (814)-861-1418